F12300 - SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water Revision:SEMI F123-0426 - Current 5 × 1015 cm 3

5 × 1015 cm 3 at cryogenic temperatures (below 80 K)

ISO 11462) in order to obtain reliable

本規定の表記法の説明，

power losses

F12300 - SEMI F123 - Guide for Meeting IRDS Yield Table Recommendations for High Purity Polymer Materials and Components Used in Ultrapure Water Revision:SEMI F123-0426 - Current 5 × 1015 cm 31 Purpose 1. 1 This Guide describes criteria for materials and components in direct contact with ultrapure water (UPW) in systems used supporting semiconductor manufacturing. 1. 2 In addition, this Guide establishes a common basis for developing detailed guidelines for future raw materials and components with the intention that these guidelines align with the IEEE IRDS Yield Enhancement Section, Yield Table YE3. 2 Scope 2. 1 This Guide provides purity