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SEMI F48-0600 (technical revision)
SEMI C90-00-0725 (complete rewrite)
the uniformity of the bonding process
It may be applied to subsystems of other multi-resource equipment
F01900 - SEMI F19 - ステンレススチール部品の接ガス・接液面の表面仕上げのための仕様 StdPbc-0619 SEMI F48-0600 (technical revision)global Gases Committee20091216global Audits and Reviews Subcommittee20102www. semi. org1995220043 SEMI F20 Referenced SEMI Standards SEMI F20 Specification for 316L Stainless Steel Bar, Extruded Shapes, Plate, and Investment Castings for Components Used in High Purity Semiconductor Manufacturing Applications SEMI F37 Method for Determination of Surface Roughness Parameters for Gas Distribution System Components SEMI F60 Test Method for ESCA Evaluation
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