F10800 - SEMI F108 - Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications StdTpc-Device Tracking SEMI S2-0706c (delayed revision)

SEMI S2-0706c (delayed revision)

The purpose of this Document is to define a method for characterizing mass flow controllers (MFCs) being considered for installation into a high-purity gas delivery system

This Specification does not define any new behavior required of the equipment other than that necessary for retrieving information describing equipment configuration

and provides some actions as below:

F10800 - SEMI F108 - Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications StdTpc-Device Tracking SEMI S2-0706c (delayed revision)This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 16, 2009. Available at www. semi. org in February 2010. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and