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The method takes a user-specified time period
SEMI E125-0304 (technical revision)
it is necessary to assign multiple substrate IDs for efficient operation as the sizes become larger
SEMI E125-1225 (technical revision)
D01800 - SEMI D18 - Specification for Cassettes Used for Horizontal Transport and Storage of Flat Panel Display Substrates Revision:SEMI D18-0299E - Inactive The method takes a user-specifiedThis specification was technically approved by the global Flat Panel Display Equipment Committee and is the direct responsibility of the North American Flat Panel Display Committee. Current edition approved by the North American Regional Standards Committee on August 15, 1998. Initially available at www. semi. org September 1998; to be published February 1999. E This document was editorially modified in October 2000 to correct a formatting error.
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