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• Definition of Standardized Symbols
The PSEM300 extends the generic Process State Model of SEMI E30 (GEM) with a Specific Process State model for prober equipment
• Equipment and load port access mode switching
consistency and reduction to increase confidence in the accuracy and repeatability of EPOC’s
E05411 - SEMI E54.11 - Specification for Sensor/Actuator Network Specific Device Model for Endpoint Devices StdPbc-0822 • Definition of Standardized SymbolsNOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects that are common to all endpoint devices (EPD) on a semiconductor equipment
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