E09800 - SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM) StdTpc-Package Specifications The results of ambient contrast

The results of ambient contrast measurements are affected by different illuminance

Support for optional attributes

動機付け

in unambiguous terms

E09800 - SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM) StdTpc-Package Specifications The results of ambient contrastPurposes of the Object Based Equipment Model include the following: Define a standard model for interfacing to multi process equipment and other complex equipment. Define standard equipment components so that communications can "discuss" component related issues. Provide an equipment model that can be easily integrated with SEMI E81 CIM Framework systems by connecting an OBEM compliant equipment to a Machine object. The purpose of the Object Based