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3-0915 (Reapproved 0923)
org in October 2018
1 — Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
SEMI E94-0701 (technical revision)
E05400 - SEMI E54 - Specification for Sensor/Actuator Network StdVol-Equipment Automation Software 3-0915 (Reapproved 0923)This Specification provides the structure of SEMIs Sensor Actuator Network (SAN) Standard. It provides the definition for interoperability with respect to SEMI SAN Standard compliant Sensor Actuator devices. This Standard specifies how devices interoperate on a network as part of the control system for equipment. This Specification, which is the root of the SAN Standard, defines the relationships of each of the other Specifications that are components