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Electrostatic compatibility of production equipment is addressed in SEMI E78
Leach-out procedures referenced within this Guide provide values for both static and dynamic conditions
1 This Standard is written to provide better communication between parties in the supply chain
SEMI E62-1106 (technical revision)
P02000 - SEMI P20 - Guideline for Catalog Publication of EB Resist Parameters (Proposal) StdPbc-0526 Electrostatic compatibility of production equipmentThis guideline was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1992. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain
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