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at which time they may be classified as defects or non-defects
This specification is part of the SEMI Sensor/Actuator Network (SAN) suite of standards and defines a specific communications protocol based on the PROFINET standard
this Test Method also allows measurement of these parameters when the injection level may influence the measured lifetime especially in the early stages of decay
on demand requests for data from the equipment
P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdTpc-Equipment Process Control at which time they mayThis checklist was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain
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