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1 The scope of this Standard is a grade of 45% potassium hydroxide solution used in the semiconductor industry
This standard was technically approved by the global Liquid Chemicals Committee
SEMI C23-0714 (Reapproved 0620)
of the diborane (see Appendix 1)
C08000 - SEMI C80 - Guide for Tetrakis(Dimethylamino) Silane (TDMAS) StdDcs-Withdrawn 1 The scope of thisThe purpose of this Document is to provide a guide for tetrakis(dimethylamino) silane (TDMAS) for which a need has been identified. The scope of this Document covers high purity TDMAS which is used in the semiconductor industry for the deposition of silicon oxide and silicon nitride based layers by atomic layer deposition. Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemical
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